MEMS Wafers and Seals

Pictured

Solar—Concentrator
The key reliability issue is the proper transfer of the excess solar thermal energy, requiring a consistent bond between the solar cell and the heat sink.

MEMS Wafers and Seals

  • Bonded Wafers
    • SEMI MS5
  • Fabrication Process Evaluation
  • Zero Level Packaging
  • Seal Integrity Evaluation
    • SEMI MS8
  • Packaging
  • Sensors
  • IMEMS
  • MOEMS
  • Lab-on-Chips
  • BioChips
  • Microarrays

Delaminations and voids can compromise the hermiticity of MEMS devices. Sonoscan's C-SAM® acoustic microscope technology delivers the next generation of innovation for MEMS inspection, finding the defects that hermetic testing just can't detect.

Tap or roll over the photos to see how they look with our instruments!

Bonded Wafer

Optical and acoustic images showing voids.

Packaging, Seals (Poly/Foil)

  • Food
  • Medical
  • Pharma
  • Other Hermetic

In many packaging applications, a seal is often used to keep the device or cavity contents sterile and contaminant-free. Voids in the application can become larger, threatening the integrity of the package by providing leak paths. Sonoscan's C-SAM® acoustic microscopes deliver the most accurate nondestructive testing for packaging and seal defects.

Tap or roll over the photos to see how they look with our instruments!

Foil Seal

Optical and acoustic images showing voids.

Blister Packs

The large black semicircle is the cavity for the pharmaceutical product. The black lines within the rainbow colored area (package seal) represent leak paths leading to the cavity.